Collection: eFOUP
The Front Opening Unified Pod made by ePAK (eFOUP) is a SEMI-standard carrier used to transport and store 200 mm wafers, 300 mm wafers and 276 mm flex frames within a fabrication facility. Designed for cleanroom use, it interfaces with load ports and automated handling systems to enable safe, contamination-controlled wafer transfer between process tools.
We offer a modular eFOUP system with six different permanent inserts which makes it capable to hold 13 or 25 wafers of 200 or 300 mm, or 25 flex frames of 276 mm. We also offer a standard 300 mm model. Both models have multiple options available for purge points, windows and handles, please reach out to our team for more information about available options for the eFOUP.
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