Twenty five slot WHS-M2 Aluminum cassette with a End wall and H-bar configuration for 3 inch semiconductor wafers
Twenty five slot WHS-M2 Aluminum cassette with a 3 rods and H-bar configuration for 3 inch semiconductor wafers
Twenty five slot WHS-M2 Aluminum cassette with a End wall and H-bar configuration for 3 inch semiconductor wafers
Twenty five slot WHS-M2 Aluminum cassette with a 3 rods and H-bar configuration for 3 inch semiconductor wafers
Twenty five slot WHS-M2 Aluminum cassette with a End wall and H-bar configuration for 3 inch semiconductor wafers
Twenty five slot WHS-M2 Aluminum cassette with a 3 rods and H-bar configuration for 3 inch semiconductor wafers
Cassette

3" Aluminum Legacy cassette, 25 slots

WHS-M2-1807798

Top/bottom:
Handle:
Slot shape:
  • Ideal for replacing older CVD process tools
  • Withstands temperatures up to 250°C (Al)
  • Hard clear anodized finish for prolonged abrasion resistance
  • Vacuum-vented screws 

  • MOQ information is available in the downloads tab on this page

The WHS® M2 Series delivers reliable, precision wafer handling in thermal environments up to 250°C. Crafted entirely from aluminum and protected with a wear-resistant hard-coat (HC) anodized finish, this cassette is built for long-term durability and exceptional abrasion resistance, ideal for replacing older CVD process tools and providing reliable performance for high-purity semiconductor applications.

Designed with smooth slot-entry and optimized slot geometry, these 3 inch aluminum legacy wafer cassettes with 25 slots ensure gentle wafer handling and minimal particle generation, meeting ISO 3 / FS209E Class 1 cleanroom requirements. Stainless steel spacers and PTFE wafer stops provide added stability and protection for a wide range of wafer types.

Vacuum-vented screws help maintain safe, consistent performance in vacuum or controlled processing environments, while full SEMI-standard compliance ensures seamless integration with industry-standard equipment.

Applications: Chemical vapor deposition (CVD), rapid thermal processing (RTP) and wafer annealing applications. Bonded or thick wafer applications
Cleanroom designation: ISO 3 (FS209E class 1)
Esd safe: yes
Product Material: Aluminum with hard clear anodized finish
Slots: 25
Wafer Size: 76 mm (3")
Datasheet →
MOQ information →
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