Four inch WHS-M1 Aluminum semiconductor wafer cassette with 25 angular shaped slots and a H-bar/H-bar top-bottom configuration.

Four inch WHS-M1 Aluminum semiconductor wafer cassette with 25 angular slots and a End-wall/H-bar top-bottom configuration.

Four inch WHS-M1 Aluminum semiconductor wafer cassette. Comes with 25 angular slots and a End wall/H-bar top-bottom configuration. with integrated handle

Four inch WHS-M1 Aluminum semiconductor wafer cassette with 25 flat slots and a H-bar/H-bar top-bottom configuration.

Four inch WHS-M1 Aluminum semiconductor wafer cassette. Comes with 25 flat slots and a End wall/H-bar top-bottom configuration.

Four inch WHS-M1 Aluminum semiconductor wafer cassette. Comes with 25 flat slots and a End wall/H-bar top-bottom configuration. with integrated handle

Cassette

4" Aluminum Process Cassettes with hard clear anodized finish, 25 slots

Name: 4" Aluminum Process Cassettes with hard clear anodized finish, 25 slots
Brand: WHS
SKU: WHS-M1-1807764
Availability: InStock

WHS-M1-1807764

Top/Bottom:

H-bar/H-bar End wall/H-bar

Handle:

Without handle With handle

Slot shape:

Angular Flat

Product variants:

Hard clear anodized finish for prolonged abrasion resistance
Withstands temperatures up to 350°C (Al)
Smooth, easy wafer slot entry and optimized slot design
Vacuum-vented screws for safe and reliable operation
Engineered according to SEMI-standard
MOQ information is available in the downloads tab on this page

Designed for the most demanding semiconductor applications, WHS® M1 series stainless steel cassettes excel where standard plastic cassettes fall short. Ideal for processing semiconductor wafers in a thermal environment, up to 350° C, these cassettes are perfect for chemical vapor deposition (CVD), rapid thermal processing (RTP), wafer annealing, and long-term bake applications.

Built to withstand high wafer insertion temperatures, these 4 inch anodized aluminum wafer cassettes allow 25 wafers to enter process tools without risk of melting or deformation, supporting higher throughput and faster processing. They are also well-suited for cluster tool automation, where cassettes may remain idle in heated vacuum chambers for multiple steps, and for moderate thermal automation environments requiring precision dimensional stability.

Whether handling thin, delicate wafers or bonded/thick wafers that exceed standard plastic cassette dimensions, WHS® metal cassettes provide unmatched durability, precision, and reliability for your critical semiconductor processes.

Applications:	Bake, chemical vapor deposition (CVD), rapid thermal processing (RTP) and wafer annealing applications
Cleanroom designation:	ISO 3 (FS209E class 1)
Esd safe:	yes
Product Material:	Aluminum with hard clear anodized finish
Slots:	25
Wafer Size:	100 mm (4")