Thirteen slot WHS-M1 Aluminum semiconductor wafer cassette with electroless nickel finish. Made with a End wall and H-bar top-bottom configuration and a integrated handle for 8 inch semiconductor wafers
Thirteen slot WHS-M1 Aluminum semiconductor wafer cassette with electroless nickel finish. Made with a End wall and H-bar top-bottom configuration and a integrated handle for 8 inch semiconductor wafers
Cassette

8" Aluminum Process Cassettes with hard clear anodized finish, 13 slots

WHS-M1-1807791

Top/Bottom:
Handle:
Slot shape:
  • Hard clear anodized finish for prolonged abrasion resistance
  • Withstands temperatures up to 350°C (Al)
  • Smooth, easy wafer slot entry and optimized slot design
  • Vacuum-vented screws for safe and reliable operation
  • Engineered according to SEMI-standard
  • MOQ information is available in the downloads tab on this page

Designed for the most demanding semiconductor applications, WHS® M1 series stainless steel cassettes excel where standard plastic cassettes fall short. Ideal for processing semiconductor wafers in a thermal environment, up to 350° C, these cassettes are perfect for chemical vapor deposition (CVD), rapid thermal processing (RTP), wafer annealing, and long-term bake applications.

Built to withstand high wafer insertion temperatures, these 8 inch anodized aluminum wafer cassettes allow 13 wafers to enter process tools without risk of melting or deformation, supporting higher throughput and faster processing. They are also well-suited for cluster tool automation, where cassettes may remain idle in heated vacuum chambers for multiple steps, and for moderate thermal automation environments requiring precision dimensional stability.

Whether handling thin, delicate wafers or bonded/thick wafers that exceed standard plastic cassette dimensions, WHS® metal cassettes provide unmatched durability, precision, and reliability for your critical semiconductor processes.

Applications: Bake, chemical vapor deposition (CVD), rapid thermal processing (RTP) and wafer annealing applications
Cleanroom designation: ISO 3 (FS209E class 1)
Esd safe: Yes
Product Material: Aluminum with hard clear anodized finish
Slots: 13
Wafer Size: 200 mm (8")
Datasheet →
MOQ information →
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