ePOD smiff pod of ePAK front view
Bottom view of ePOD smiff pod from ePAK
Side view from ePAK ePOD smiff pod
ePOD smiff pod of ePAK front view
Bottom view of ePOD smiff pod from ePAK
Side view from ePAK ePOD smiff pod
ePOD smiff pod of ePAK front view
Bottom view of ePOD smiff pod from ePAK
Side view from ePAK ePOD smiff pod
SMIF pod

ePOD pro SMIF pod

eWB0680-ASSY-1

Size:
  • Designed for compatibility with automated systems
  • Visual window for easy confirmation of open/closed status
  • Base is equipped with standard LP interface
  • SEMI/FIMS compliant

The ePOD is a high-performance SMIF (Standard Mechanical Interface) pod engineered to protect semiconductor wafers during storage and transport. The ePOD provides a sealed, ultra-clean environment that safeguards wafers from airborne contaminants, static, and light exposure.

Designed for seamless integration with semiconductor tools, the ePOD features a bottom-opening door that mates precisely with load ports, enabling wafer cassette transfers without exposure to ambient air. The wafer pod typically holds 1 cassette for 25 wafers, stored horizontally inside the pod.

Applications: Horizontal wafer shipping
Esd safe: Yes
Wafer Size: 200 mm (8")
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