Front side of a ASM Epsilon 2000 Epitaxial replacement cassette
top side of a ASM Epsilon 2000 Epitaxial replacement cassette filled with semiconductor wafers
Side view of a ASM Epsilon 2000 Epitaxial replacement cassette filled with semiconductor wafers
Front side of a ASM Epsilon 2000 Epitaxial replacement cassette
top side of a ASM Epsilon 2000 Epitaxial replacement cassette filled with semiconductor wafers
Side view of a ASM Epsilon 2000 Epitaxial replacement cassette filled with semiconductor wafers
Front side of a ASM Epsilon 2000 Epitaxial replacement cassette
top side of a ASM Epsilon 2000 Epitaxial replacement cassette filled with semiconductor wafers
Side view of a ASM Epsilon 2000 Epitaxial replacement cassette filled with semiconductor wafers
Cassette

ASM Epsilon 2000 Epitaxial replacement cassettes

WHS-M5

  • Resistant to high temperatures and chemical exposure
  • Stable, precision wafer handling
  • Optimized for cleanroom environments

The EPI cassette provides consistent wafer spacing to ensure uniform thermal exposure and is engineered to withstand high temperatures and harsh chemical environments.

Key Benefits:

  • Heat and Chemical Resistance: Built to endure the extreme conditions of diffusion and oxidation processes.
  • Precision Handling: Maintains wafer stability to prevent contamination or misalignment.
  • Cleanroom Compatibility: Designed for low particle generation, helping preserve process purity.

Materials:

  • Polyetherimide (PEI – Ultem):
    Offers excellent high-temperature resistance and mechanical strength, with low outgassing and minimal contamination—ideal for cleanroom applications.
  • Aluminum:
    Provides robust structural support and enhanced heat resistance.
Esd safe: Yes
Product Material: Polyetherimide – PEI
Slots: 26 slots
Wafer Size: 200 mm (8")
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