WHS® metal wafer carrier with 25 slots for 3 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 8 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 2 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 3 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 8 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 2 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 3 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 8 inch semiconductor wafers, placed in the cleanroom
WHS® metal wafer carrier with 25 slots for 2 inch semiconductor wafers, placed in the cleanroom
Cassette

Stainless steel cassette

WHS-M3-1808037

size:
Slots:
  • High temperature applications up to 550°
  • SEMI automation compliant
  • Scratch reducing beveled slot design

  • MOQ information is available in the downloads tab on this page

The WHS M3 Series is a high-temperature stainless steel process cassette available in sizes from 76 mm (3") to 200 mm (8"). These SEMI-compliant metal wafer cassettes come in 13 or 25-slot configurations and feature an 8° slot angle that mirrors the profile of standard industry plastic cassettes.

Constructed from electropolished (EP) 316 stainless steel, the M3 Series is ideal for thermal automation processes, general bake applications up to 550°C, and both mega- and ultrasonic cleaning environments.

MOQ information is available in the downloads tab on this page.

Applications: Bake, Thin Wafer Handling, Thick Wafers and Ultrasonic and megasonic
Cleanroom designation: ISO 3 (FS209E class 1)
Esd safe: Yes
Product Material: Stainless steel SST
Slots: 13 (8" only) or 25
Datasheet →
MOQ information →
recommended

You may also like

Recommended solutions proven to meet industry standards

Let's start with a conversation

In our industry, trust begins with clear communication. Whether it's your first question or your tenth year with us - we're here to support you.
Contact Us