Collection: WHS-M3 Stainless steel cassette
The WHS-M3 stainless steel wafer cassette is engineered for demanding high-temperature and automated semiconductor processes. Manufactured from electropolished (EP) 316 stainless steel, it features a SEMI-compliant design with 25 wafer slots and an 8° slot angle matching the profile of an industry-standard plastic cassette. Ideal for thermal automation, bake applications up to 550°C, and mega- or ultrasonic cleaning processes, the WHS-M3 delivers reliable performance in harsh cleanroom environments.
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