Optimize your wafer processing with WHS® metal cassettes
Reliable wafer processing starts with reliable wafer handling. WHS® metal cassettes are designed to deliver the precision, durability, and flexibility required in semiconductor manufacturing. Whether you require a configurable aluminum cassette, a legacy replacement, a high-temperature solution, or a 300 mm process cassette, the WHS® portfolio provides a solution engineered for your application. Explore the complete range below.
WHS-M1
The WHS-M1 metal cassette series is engineered to meet the unique requirements of your wafer handling process. Its fully modular design allows the cassette to be configured to your preferred handling method, while the high-quality aluminum construction provides an excellent balance of durability and performance. Choose an Electroless Nickel (EN) finish for vacuum applications or a Hard Clear Anodized finish for thermal processing ensuring the cassette is optimized for your specific environment.
- Superior material quality
- Reduced particle generation
- Available for 3", 4", 6" and 8" wafers
- Ideal for vacuum environments and long therm thermal bake applications
WHS-M2
The WHS-M2 metal cassette series is designed as a reliable replacement solution for legacy aluminum cassettes used in semiconductor process equipment. Compatible with older CVD process tools, the modular design allows the cassette to be configured according to your specific handling requirements. Vacuum vented screws eliminate trapped air and reduce the risk of virtual leaks, ensuring reliable wafer processing and minimizing process interruptions.
- Ideal to replace older CVD tools
- SEMI compliant
- Available for 3", 4", 6" and 8" wafers
WHS-M3
The WHS-M3 metal cassette series is engineered for demanding high-temperature wafer processing applications up to 550°C. Manufactured from electropolished 316 stainless steel, the M3 provides excellent thermal stability and corrosion resistance, making it ideal for applications such as long-term thermal baking and ultrasonic or megasonic cleaning. Its robust, dimensionally stable design ensures reliable automated handling and consistent performance, even after prolonged exposure to harsh cleanroom environments.
- For processing up to 550°C
- SEMI automation compliant
- Scratch reducing slot design
- Available for 3", 4", 6" and 8" wafers
WHS-M4
The WHS-M4 series is stands out in its size, quality and compatibility. The 300mm cassettes are available in Aluminum and stainless steel, making it a engineered solution for multiple applications. It features a strong dimensionally stable design and locking bar for safe transport. The WHS-M4 cassettes are fully SEMI compliant and compatible with all 300 mm load ports, it integrates seamlessly into automated handling systems.
- Matches the profile of an industry standard FOUP
- Ergonomic fix-mounted side handles
- Locking bar for safe transport
- Premium materials for reliable performance